Wafer carrier having more support ribs and lighter weight and method
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United States of America Patent
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Dec 17, 2002
Grant Date -
N/A
app pub date -
Oct 15, 2001
filing date -
Oct 15, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A lightweight, carrier for wafer-like objects, including semiconductor wafers, is provided. The carrier may be used to secure and position a wafer during various polishing processes. The improved design of the lightweight carrier includes a relatively high number of ribs and an annular flange having an annular protrusion to provide uniform load onto the wafer during polishing operations. The relatively lower weight of the carrier facilitate manual loading and unloading of it (the carrier) into and from the polishing machine.
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