Method and apparatus for improving a dark field inspection environment
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United States of America Patent
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-
Dec 3, 2002
Grant Date -
N/A
app pub date -
May 31, 2000
filing date -
May 31, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus and method is disclosed for facilitating a dark field inspection. The workpiece inspection apparatus comprises three sides and a light-blocking top and defines a dark field inspection area. Light incident on the top is substantially blocked while a clean room environment is maintained by allowing air to permeate through the top.
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