Segmented-target ionized physical-vapor deposition apparatus and method of operation
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United States of America Patent
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Dec 3, 2002
Grant Date -
N/A
app pub date -
Oct 20, 2000
filing date -
Oct 20, 2000
priority date (Note) -
Expired
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Abstract
A segmented target system and method performs an ionized physical-vapor deposition of a material on a work piece. The system includes an optimal permanent magnet array, vacuum plate, and multiple target segments formed from an electrically conductive material and are coupled to the vacuum plate. The system further includes multiple power sources where each power source couples to at least one of the target segments and where each of the power sources couples to at least one phase shifter forming a multiple inductive source. A circuit couples the power sources and the target to transfer power from the power sources to the target. The interaction of the multiple inductive sources once powered forms an inductively coupled electromagnetic field approximately parallel to the target that increases the ionization of the PVD sputter species, enhances the material density and collimation of deposition on the work piece.
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