Crack stop between neighboring fuses for protection from fuse blow damage

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United States of America Patent

PATENT NO 6486526
SERIAL NO

09223826

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Abstract

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A fuse structure in an integrated circuit chip is described that includes an insulated semiconductor substrate; a fuse bank integral to the insulated semiconductor substrate consisting of a plurality of parallel co-planar fuse links; and voids interspersed between each pair of the fuse links, the voids extending beyond a plane defined by the co-planar fuse links. The voids surrounding the spot to be hit by a laser beam during fuse blow operation act as a crack stop to prevent damage to adjacent circuit elements or other fuse links present. By suitably shaping and positioning the voids, a tighter pitch between fuses may be obtained.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AGGERMAN NOE BE BERG NEUBIBERG BAVARIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brintzinger, Axel C Fishkill, NY 8 146
Kiewra, Edward W Verbank, NY 48 553
Narayan, Chandrasekhar Hopewell Junction, NY 75 2660
Radens, Carl J LaGrangeville, NY 271 5151

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