Micro-machine (MEMS) switch with electrical insulator
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United States of America Patent
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Nov 19, 2002
Grant Date -
Sep 20, 2001
app pub date -
Mar 16, 2001
filing date -
Mar 16, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-machine switch which causes a contact electrode to make contact with or separate away from a signal line formed on a substrate, to thereby turn on or off the signal line, includes (a) first to N-th lower electrodes formed on the substrate, wherein N is an integer equal to or greater than 2, (b) first to N-th upper electrodes supported facing the first to N-th lower electrodes, respectively, and (c) an electrode supporter for vertically raising and lowering the first to N-th upper electrodes between a first position where the contact electrode makes contact with the signal line when electrostatic force is generated between the first to N-th upper electrodes and the first to N-th lower electrodes, respectively, and a second position where the contact electrode is separated away from the signal line when the electrostatic force is not generated.
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