Vacuum treatment equipment
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United States of America Patent
Stats
-
Nov 19, 2002
Grant Date -
Mar 14, 2002
app pub date -
Nov 15, 2001
filing date -
Dec 23, 1996
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A vacuum treatment system has an outer housing which defines a substantially cylindrical inner wall around an axis. At least two openings are provided for treating or conveying-through a respective workpiece arranged along at least one great circle of the cylindrical inner wall. One treatment, conveying or lock chamber respectively, is connected with the at least two openings. An inner housing defines a cylindrical outer wall and, together with the substantially cylindrical inner wall, forms a substantially cylindrical ring gap. A workpiece carrier carousel is rotationally drivable about the axis in the ring gap. A feed device comprising driving devices is movable in a radially driven manner on the inner housing and is aligned with the at least two openings. The driving devices act into the ring gap, and each of the driving devices has a separate drive.
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