Method for the calibration of an RF integrated circuit probe
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United States of America Patent
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Nov 12, 2002
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N/A
app pub date -
Feb 7, 2000
filing date -
Feb 18, 1999
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Abstract
A method for the calibration of an RF integrated circuit probe comprising a step to determine the characteristics of the RF transmission lines of the probe by means of a vector network analyzer and standard circuits on silicon substrate. The standard circuits comprise contact pads corresponding by their layout to RF connection pads of the integrated circuits to be tested.
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