Wire bonding apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6474529
APP PUB NO 20020063144A1
SERIAL NO

09987807

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A wire bonding apparatus, which realizes a reduction in weight and inertia of a bonding arm and which allows high-speed Z-axis swinging, is disclosed. The wire bonding apparatus comprises a bonding head 3 fixed to an X-Y stage 30, a bonding arm 4 swinging in the Z-axis direction around a bonding head swinging shaft 13, a pair of wire clamp portions 7a and 7b, and an actuator for driving at least one of wire clamp portions 7a and 7b. At least, one portion of the actuator is provided on the bonding head 3 fixed onto the X-Y stage 30 so as to be spaced apart from the bonding arm 4, whereby a reduction in the weight and inertia of the bonding head 3 is achieved.

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Patent Owner(s)

Patent OwnerAddress
NEC CORPORATION108-8001 TOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kubota, Noriyuki Tokyo, JP 5 10
Yamaguchi, Toshiaki Tokyo, JP 84 612

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