Optical switching device and method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Oct 22, 2002
Grant Date -
N/A
app pub date -
Apr 26, 2000
filing date -
Apr 26, 2000
priority date (Note) -
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Abstract
A method of measuring with high accuracy the composition of shape memory alloy elements that are sputter deposited in thin film form. An element of known composition is polished with a flat surface. An element of unknown composition is sputter deposited onto the surface. Miniature openings are made by photography in the unknown layer, exposing an area of the known substrate. With adjacent areas of the two samples then only microns apart, accurate measurements of the compositions are made by comparing the X-ray spectra resulting from an electron beam scanning across the two areas.
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