Gas delivery system
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United States of America Patent
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Oct 22, 2002
Grant Date -
N/A
app pub date -
Mar 3, 2000
filing date -
Mar 8, 1999
priority date (Note) -
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Abstract
A gas delivery system for plasma treatment apparatus includes a gas inlet, a plenum, a gas delivery plate extending across the downstream end of the plenum and a separate ionizer plate adjacent the downstream face of the gas delivery plate. The ionizer plate is formed with openings which are larger than the apertures in the gas delivery plate.
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