Capturing an evolving wafer fabrication method and system
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United States of America Patent
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Oct 15, 2002
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N/A
app pub date -
Jul 14, 1999
filing date -
Jul 14, 1999
priority date (Note) -
Expired
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Abstract
A method and system for use in wafer fabrication systems. The method and system capture an evolving wafer fabrication system by mapping at least one interaction between a selected at least one integral part associated with the wafer fabrication system and at least one other integral part associated with the wafer fabrication system.
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