Optical radiation measurement apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6462315
SERIAL NO

09208954

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An optical radiation measurement apparatus is provided. The apparatus has at least one radiation detector for measuring electromagnetic radiation emitted from at least two radiation sources. Separate radiation channels are provided in a channel member in order to provide a radiation path between the radiation sources and the radiation detector, which is common to all of the radiation sources.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTDNO 8 BUILDING NO 28 JINGHAI ER RD ECONOMIC AND TECHNICAL DEVELOPMENT ZONE BEJING 100176

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hauf, Markus Ichenhausen, DE 64 652

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation