Bondhead for a wire bonder
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United States of America Patent
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-
Oct 8, 2002
Grant Date -
N/A
app pub date -
Oct 24, 2000
filing date -
Nov 2, 1999
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A Wire Bonder contains a bondhead which comprises a slide, a rotary beam rotatable on a vertical axis and a rocker mounted on the rotary beam. The slide is movable back and forth in a predetermined horizontal direction and moves the rotary beam with it. The slide preferably bears on a horizontally arranged glide plate by means of an air bearing charged with vacuum. The rotary beam also preferably bears on the glide plate by means of a further air bearing charged with vacuum. A drive arranged on the slide is preferably foreseen for the rotating movement of the rotary beam.
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