Capacitor structure and fabrication process
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United States of America Patent
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Oct 8, 2002
Grant Date -
N/A
app pub date -
Jul 10, 1998
filing date -
Jul 11, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a capacitor structure with two substrates (1) each having a capacitor electrode (3) deposited on its surface, the substrates (1) being joined together by bump structures located on both sides of the capacitor electrodes (3) such that the capacitor electrodes (3) lie opposite each other and form a capacitor, the distance d between the capacitor electrodes (3) being defined by the height of the bump structures, and measuring connections (5) being provided on one of the substrates (1) for making capacitance measurements.
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