Moire interferometer with overlapping illumination and imaging systems
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United States of America Patent
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Sep 24, 2002
Grant Date -
N/A
app pub date -
Nov 9, 2000
filing date -
Nov 9, 2000
priority date (Note) -
Expired
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Abstract
A moire interferometer has an illumination system and an imaging system that share a common focusing optic, which preferably takes the form of a concave mirror. Within the illumination system, the common focusing optic collimates light en route to a test surface. Within the imaging system, the common focusing optic telecentrically images a grating pattern appearing on the test surface onto a fringe pattern detector.
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