Apparatus for processing workpieces
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United States of America Patent
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Sep 24, 2002
Grant Date -
N/A
app pub date -
Jan 2, 2001
filing date -
Jun 26, 1997
priority date (Note) -
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Abstract
Radial cluster tools, for example, include a central load/unload station and processing chambers for processing workpieces, such as semiconductor wafers. The processing chambers are arranged about the central load/unload station in abutting pairs to leave substantial maintenance spaces.
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