Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
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United States of America Patent
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Sep 17, 2002
Grant Date -
N/A
app pub date -
Jan 13, 2000
filing date -
May 28, 1999
priority date (Note) -
Expired
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Abstract
A number of micromachined optomechanical switching cells and matrix switches including such switching cells are disclosed herein. One optomechanical switching cell of the present invention includes a parallel plate actuator positioned on a substrate. A mirror coupled to the actuator is disposed to selectively redirect an incident optical beam. The present invention also contemplates an optomechanical matrix switch including a substrate and a plurality of optomechanical switching cells coupled thereto. The matrix switch further includes an arrangement for monitoring the optical power incident upon, and output by, the matrix switch.
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