Micromachined optomechanical switching devices
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United States of America Patent
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Sep 10, 2002
Grant Date -
N/A
app pub date -
Jan 13, 2000
filing date -
May 28, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Various configurations of micromachined optomechanical switching cells are disclosed herein. In accordance with the invention, an optomechanical switching cell is provided which includes an actuator positioned on a substrate and a mirror coupled to the actuator. The switching cell also includes an electrode disposed upon the substrate under the actuator. An insulator may also be interposed between the substrate and the electrode. In another aspect of the present invention the switching cell includes a latch having a first end region connected to the substrate and a second end region engaged by the mirror.
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