Vaporization and cracker cell apparatus
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United States of America Patent
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Sep 10, 2002
Grant Date -
N/A
app pub date -
Feb 2, 1999
filing date -
Feb 2, 1999
priority date (Note) -
Expired
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Abstract
An apparatus for vaporizing and cracking chemical elements for use in a deposition process is provided. The apparatus includes a vaporization cell integrally connected with a thermal cracker cell. The vaporization cell has an inlet section in communication with a valve section defining a heating chamber capable of holding a liquid or solid chemical material to be vaporized. A heat source is positioned in the heating chamber and is capable of providing sufficient thermal energy to evaporate or sublimate the chemical material. The thermal cracker cell is communicatively connected to an outlet of the vaporization cell, and includes an elongated tapered tube with a heating element associated therewith. The heating element is capable of providing sufficient thermal energy to dissociate molecular clusters of vaporized chemical material. This provides monomeric or dimeric chemical elements for use in a deposition process such as during semiconductor device fabrication.
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