Multi-anode device and methods for sputter deposition
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United States of America Patent
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Aug 27, 2002
Grant Date -
N/A
app pub date -
Jun 28, 2000
filing date -
Jun 28, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and apparatus for vacuum coating plural articles employs a drum work holder configuration and a sputter source with a plurality of individually controlled anodes for effectively providing uniform coatings on articles disposed at different locations on the drum work holder. A small number of measured process parameters are used to control a small number of process variable to improve coating uniformity from batch to batch.
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