Two stage scroll vacuum pump with improved pressure ratio and performance
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Aug 27, 2002
Issued Date -
N/A
app pub date -
Nov 20, 2000
filing date -
Jan 11, 1999
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Abstract
A scroll vacuum pump includes a first stage having a first stage fixed plate with a spiral involute, a second stage having a second stage fixed plate with a spiral involute wrap, and an orbiting plate having upper and lower surfaces. An involute spiral extends from the orbiting plate bottom surface to define a first stage orbiting plate and a second involute spiral extends from the orbiting plate top surface to define a second stage orbiting plate. The first stage involute wraps are taller than the second stage involute wraps. Gas is expanded in the first stage and compressed in the second stage. The first stage has an expansion ratio greater than or equal to one and the second stage has a compression ratio greater than or equal to one. However, that the pressure at the second stage exit is less than the pressure at the first stage inlet. To increase the efficiency of the pump, the tip seals of the involute spirals are extended as close as possible to the center of the involute to delay porting of gas by 180.degree. of rotation.
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