Turbo-molecular pump
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United States of America Patent
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Aug 20, 2002
Grant Date -
Nov 22, 2001
app pub date -
Jul 6, 1999
filing date -
Jul 22, 1997
priority date (Note) -
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Abstract
In a turbo-molecular pump, a rotor is supported by a magnetic bearing (3) in a non-contact mode. A pump control section (2) has a magnetic bearing control device (8) with a digital signal operating processor or DSP (7) which is programmable by a software or which can execute a programmed software. The digital signal operating processor (7) performs the control of a heating system, namely, a heater, as well as the control of the magnetic bearing (3).
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