Sol materials
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United States of America Patent
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Jul 30, 2002
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N/A
app pub date -
Jul 1, 1999
filing date -
Apr 2, 1999
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Abstract
The invention provides a fast-cured sol material, which is produced by hydrolysis and condensation of the following starting materials: 2-60 parts by weight of a silicon alkoxide; 20-98 parts by weight of an alcohol; 0.5-50 parts by weight of an aqueous media; 0.0001-10 parts by weight of a base; 0.001-30 parts by weight of at least one additive; and optionally 0.0001-10 parts by weight of an acid. A coating of the sol material according to the invention can be directly cured (without aging) to obtain a microporous dielectric film without shrinkage or cracks.
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