Plasma vacuum pumping cell
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United States of America Patent
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Jul 23, 2002
Grant Date -
Aug 23, 2001
app pub date -
Dec 28, 2000
filing date -
Jun 29, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member (4) positioned between the first and second regions, the partition member (4) having a through opening defining a conduit (22); a plurality of magnets (24) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source (34) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit (22) to the second region.
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