Turbo molecular pump
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United States of America Patent
Stats
-
Jul 16, 2002
Grant Date -
Dec 13, 2001
app pub date -
Jun 15, 2001
filing date -
Aug 13, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A turbo molecular pump comprises an electric component section having a motor, a base section supporting the electric component section, a shaft rotationally driven by the motor, and an impeller connected to the shaft for rotation therewith. A casing houses the electric component section, and a heat insulating material is disposed between the casing and the base section.
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