Method for transporting at least one vaporous substance through the wall of a vacuum chamber and into the vacuum chamber and a device for executing and utilizing the method
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United States of America Patent
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Jul 9, 2002
Grant Date -
N/A
app pub date -
May 10, 2000
filing date -
May 11, 1999
priority date (Note) -
Expired
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Abstract
Method for transporting at least one vaporous substance through the wall (4) of a vacuum chamber and into the vacuum chamber and device for executing and utilizing the method. In the method, a vaporous substance is introduced from the outside through an interior pipe (1) of a double-walled pipe into the vacuum chamber, with electric current from a power supply (3) applied to the interior pipe (1) and exterior pipe (2) of the double-walled pipe.
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