Method for determining on-chip sheet resistivity
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United States of America Patent
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Jun 11, 2002
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N/A
app pub date -
Aug 12, 1999
filing date -
Sep 25, 1997
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Abstract
A method measures a resistance in a test structure to determine the sheet resistivity of a test structure. In one embodiment, a family of test structures is provided to determine the effective sheet resistivity of a conductor as a function of its width. The method is applicable to conductors in manufacturing processes in which 'slots' or 'islands' are created in the conductor to prevent dishing during chemical-mechanical polishing.
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