Microwave plasma generator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 11, 2002
Grant Date -
Apr 18, 2002
app pub date -
Apr 9, 2001
filing date -
Apr 18, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A plasma generator according to the invention includes a rectangular waveguide into which a microwave is introduced, a coaxial tube connected in a T shape to the rectangular waveguide through their respective openings, a vacuum sealing window for blocking the openings with an insulator to thereby vacuum seal the interior of the coaxial tube against the rectangular waveguide, and an insulator arranged in the coaxial tube as linked to the vacuum sealing window, thus facilitating microwave matching.
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Cited Art Landscape
Patent Citation Ranking
- 15 Citation Count
- C23C Class
- 45.71 % this patent is cited more than
- 23 Age
