Capacitive displacement sensor for measuring thin targets
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United States of America Patent
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-
Jun 4, 2002
Grant Date -
N/A
app pub date -
Jul 21, 2000
filing date -
Jul 21, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A capacitive displacement sensor for measuring thin targets is presented. The plate of the measurement probe is designed to take into account the thin target shape and to provide accurate measurements of the thin target by reducing lateral movement sensitivity of the plate. The probe may also include a guard to reduce capacitive coupling of the plate with other structures which would affect the accuracy of the measurement.
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