Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems
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United States of America Patent
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Jun 4, 2002
Grant Date -
N/A
app pub date -
Aug 9, 2000
filing date -
Aug 9, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A system for adjusting a deformable mirror including a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures coupled on a first end to the pneumatic actuators, and coupled on a second end to the non-reflective side the deformable mirror, the plurality of push-pull flexures being disposed at various locations on the back of the deformable mirror. The respective pairs of push-pull flexures and pneumatic actuators are operated to support and alter the shape of the deformable mirror to allow for correction of a plurality of optical aberrations.
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