Method and apparatus for measuring a wavefront
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United States of America Patent
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May 7, 2002
Grant Date -
N/A
app pub date -
May 20, 2000
filing date -
May 20, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Embodiments of the present invention provide method and apparatus for measuring a wavefront of a beam of radiation. In particular, one embodiment of the present invention is an apparatus for measuring a wavefront of a beam of radiation at a first plane which includes: (a) relay optics adapted to relay the wavefront from the first plane to a second plane; (b) a moving boundary locus apparatus disposed between the first and second planes; (c) a two-dimensional photodetector array comprising--at least 4.times.4 photodetector elements disposed in the second plane, wherein each photodetector element produces a time varying signal in response to movement of a portion of the moving boundary locus apparatus; (d) a synchronizer adapted to synchronize each of the time varying signals with a position of the portion of the moving boundary locus apparatus; and (e) an analyzer, responsive to synchronized time varying signals output from the synchronizer, to measure the wavefront of the beam.
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