Semiconductor device having uniform spacers
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United States of America Patent
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Apr 30, 2002
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N/A
app pub date -
May 9, 2000
filing date -
Dec 18, 1997
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Abstract
A semiconductor device having both functional and non-functional or dummy lines, regions and/or patterns to create a topology that causes the subsequently formed spacers to be more predictable and uniform in shape and size.
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