Ion laser apparatus and mirror angle adjusting method therefor
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United States of America Patent
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Apr 23, 2002
Grant Date -
N/A
app pub date -
Feb 3, 2000
filing date -
Feb 4, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An ion laser apparatus includes a laser tube, first and second mirrors, a mirror angle adjusting mechanism, and an alignment controller. The first and second mirrors are disposed to sandwich the laser tube. The mirror angle adjusting mechanism adjusts an angle of at least one of the mirrors while scanning the mirror within a predetermined angle width. The alignment controller determines a scan angle width of the mirror in accordance with a light intensity distribution of a laser beam such that a variation value of the laser beam output from the laser tube falls within a predetermined width. A mirror angle adjusting method for this ion laser apparatus is also disclosed.
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