Adaptive GCIB for smoothing surfaces
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United States of America Patent
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Apr 23, 2002
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N/A
app pub date -
Oct 5, 1999
filing date -
Jul 19, 1999
priority date (Note) -
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Abstract
A method and apparatus for adapting the nature of an ion beam during processing of the surface of a solid workpiece so as to improve the reduction of surface roughness (smoothing) by using a GCIB. In addition, the invention provides for surface smoothing in combination with etching to predetermined depths and surface contamination removal. Advantages are minimum required processing time, minimum remaining roughness of the final surface, and reduction in the amount of material that must be removed in order to attain a desired level of smoothness.
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