Method of measuring electromagnetic radiation

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United States of America Patent

PATENT NO 6369363
SERIAL NO

09789942

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Abstract

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A method is provide for measuring electromagnetic radiation radiated from a surface of an object that is irradiated by electromagnetic radiation given off by at least one radiation source. The radiation given off by the radiation source is determined by at least one first detector, and the radiation given off by the irradiated object is determined by at least one second detector that measures the radiation. The radiation from the at least one radiation source is actively modulated with at least one characteristic pyrometer. The radiation determined by the second detector is corrected with the radiation determined by the first detector to compensate for the radiation of the radiation source reflected from the object.

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Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTDNO 8 BUILDING NO 28 JINGHAI ER RD ECONOMIC AND TECHNICAL DEVELOPMENT ZONE BEJING 100176

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Balthasar, Horst Neu-Ulm, DE 2 44
Hauf, Markus Ichenhausen, DE 64 652
Knarr, Thomas Langenau, DE 5 169
Muller, Uwe Eibensbach, DE 25 262
Walk, Heinrich Allmendingen, DE 11 266

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