Long tooth rails for semiconductor wafer carriers
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United States of America Patent
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Mar 19, 2002
Issued Date -
N/A
app pub date -
Sep 29, 2000
filing date -
Oct 2, 1998
priority date (Note) -
Expired
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Abstract
A rail for use as a support in an apparatus for holding semiconductor wafers during heat treatment of the wafers in a furnace comprises a plurality of teeth arranged such that the space between adjacent teeth can receive a portion of a semiconductor wafer. The teeth contain a raised support structure, such as a ledge, located on their top surface for supporting a wafer. Each tooth usually has a length greater than about 20 millimeters, and the raised support structure typically occupies greater than about 50% of the length of a tooth.
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