Laser processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Mar 12, 2002
Grant Date -
N/A
app pub date -
Oct 21, 1999
filing date -
Oct 29, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a power monitor mode, during the laser oscillation output there are fetched laser output measured values, lamp voltage measured values and lamp current measured values (step J.sub.1), and energy of each pulse is figured out on the basis of time integral value of the laser output measured values (step J.sub.2). Then, at a certain time Ta interval, an energy average value and a laser output average value are figured out for display based on the cumulative value of the energy of each pulse, and a lamp power average value Q.sub.M and a lamp power input ratio K.sub.M are found by calculation from the cumulative value of the lamp power (S.sub.V.multidot.S.sub.I) of each pulse (step J.sub.5). In OFF display mode the lamp power input ratio K.sub.M appears. Under the laser output feedback control, the lamp power input ratio K.sub.M gradually goes up according as the deterioration with time increases within a laser oscillation unit.
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