Air cleaning filter, process for preparing the same, and high-level cleaner
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United States of America Patent
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Mar 5, 2002
Grant Date -
N/A
app pub date -
Jan 24, 2000
filing date -
May 26, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to an air filter having an inorganic material layer in which the following adsorbent is fixed on the surface of the supporter using powder of an inorganic substance as a binder. That is, the adsorbent is prepared by impregnating a salt of an inorganic acid to powder of an inorganic substance consisting of at least one of diatom earth, silica, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, activated clay, activated bentonite, or synthetic zeolite. The air filter according to the present invention can adsorb and remove both of gaseous basic impurities and gaseous organic impurities, thus making a very effective filter for manufacturing semiconductor and LCD.
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