On-site generation of ultra-high-purity buffered-HF and ammonium fluoride

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United States of America Patent

PATENT NO 6350425
APP PUB NO 20010051128A1
SERIAL NO

08881747

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is a novel method and system for preparing ultra-high-purity buffered-hydrofluoric acid or ammonium fluoride controlled concentration The method comprises bubbling purified ammonia vapor into ultra-pure hydrofluoric acid. The inventive method and system can be used as an on-site subsystem in a semiconductor device fabrication facility for supplying the buffered-hydrofluoric acid and ammonium fluoride to points of use in the semiconductor device fabrication facility.

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Patent Owner(s)

Patent OwnerAddress
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDEPARIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, R Scot Fallbrook, CA 20 403
Hoffman, Joe G Cardiff, CA 32 551

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