Process for synthesizing one-dimensional nanosubstances by electron cyclotron resonance chemical vapor deposition
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United States of America Patent
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Feb 12, 2002
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May 14, 1999
filing date -
Jan 11, 1999
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Abstract
The present invention provides a process for synthesizing one-dimensional nanosubstances. A membrane having channels serves as the host material for the synthesis. The anodic membrance is brought into contact with a microwave excited plasma of a precursor gas using an electron cyclotron resonance chemical vapor deposition (ECR-CVD) system. Parallel aligned nanosubstances can be synthesized in the channels of the membrane over a large area. Carbon nitride nanosubstances are synthesized successfully for the first time in the present invention.
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