Surface measuring apparatus having relative displacement between a probe and its carriage
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United States of America Patent
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Feb 5, 2002
Grant Date -
N/A
app pub date -
Jul 21, 2000
filing date -
Dec 4, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A metrological instrument for measuring surface characteristics such as surface form of a component (300). The instrument includes a slideway (32) to cause relative movement between a surface sensing probe (84) and the component which allows the probe to traverse a surface of the component. A probe carriage (80) supports the probe to allow the probe to move as a body in a measurement direction relative to the carriage so as to follow a surface being sensed. An optical sensor (82) provides a signal indicative of the displacement of the probe relative to the probe carriage. A controller (83) acts in response to a signal from the optical sensor, to move the probe carriage so as to maintain the probe in an operational range. A further sensor (11) measures measurement of displacement of the probe in the measurement direction as it follows a surface during use of the instrument.
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