Method for aligning optical devices with substrate
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 5, 2002
Grant Date -
N/A
app pub date -
Nov 5, 1999
filing date -
Nov 5, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An easy method proposes a passive alignment by using an alignment mark. That is, V-shaped grooves are utilized as alignment marks in place of a metal pattern of the prior art in observing an optical contrast. Also, in order to adjust a height of an optical device, the support made of a metal is formed in the conventional method, whereas in the present invention a height of an optical device is adjusted by etching the silicon substrate and clamped through the use of solder bumps formed in the V-shaped grooves. And also, in this invention, it is possible that V-shaped grooves can be facilely formed on a non-planarized substrate by using a method of burying a mask material during the formation of the V-shaped grooves. By applying the above principle, the present invention proposes a process capable of passive aligning an optical device, a planar lightwave circuit (PLC) and an optical fiber, simultaneously.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully