Photosensitive compositions and pattern formation method

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United States of America Patent

PATENT NO 6342330
SERIAL NO

09750672

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Abstract

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Photosensitive compositions prepared without use of a chromium compound. The compositions exhibit high resolution and satisfactory sensitivity, and do not cause environmental pollution. The photosensitive compositions contain a water-soluble azide compound which serves as a photocrosslinking agent and poly(N-vinylacetamide) that is photocrosslinkable in the presence of the water-soluble azide compound.

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Patent Owner(s)

Patent OwnerAddress
TOYO GOSEI KOGYO CO LTDICHIKAWA-SHI CHIBA 272-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tagoshi, Hirotaka Chiba, JP 9 112
Tochizawa, Noriaki Chiba, JP 12 51
Watanabe, Masaharu Chiba, JP 37 451
Yamaguchi, Tetsuhiko Kanagawa, JP 19 172

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