Thin film forming equipment and method
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United States of America Patent
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Jan 8, 2002
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N/A
app pub date -
Mar 22, 2000
filing date -
Mar 24, 1999
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Abstract
A thin film forming equipment and a method for forming thin films are provided which are capable of forming the thin film of high quality and of effectively preventing CVD material gas from leaking to surroundings at a low cost. The thin film equipment contains a substrate, a substrate holding device used to hold the substrate and a device used to provide an atmospheric gas to a surface of the substrate held by the substrate holding device, wherein an upper face of the substrate held by the substrate holding device and an upper face of the substrate holding device are almost on one plane.
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