Optical system for detecting surface defects, a disk tester and a disk testing method
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United States of America Patent
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Dec 11, 2001
Grant Date -
N/A
app pub date -
Oct 26, 2000
filing date -
Oct 27, 1999
priority date (Note) -
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Abstract
Annular rays of light are received by a hollow optical member and focused as light beams on the surface of a disk to be tested and as the scattered light from the disk surface travels toward the hollow portion of the optical member, it is received by an objective lens and then received by a light receiver via the objective lens.
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