Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
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United States of America Patent
Stats
-
Dec 11, 2001
Grant Date -
N/A
app pub date -
Feb 4, 2000
filing date -
Feb 4, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed.
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