Crystal manufacturing apparatus and method
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United States of America Patent
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Dec 4, 2001
Grant Date -
N/A
app pub date -
Sep 13, 1999
filing date -
Sep 16, 1998
priority date (Note) -
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Abstract
SLH, CLH, and an output of the weight sensor enter a main control section to calculate MD, MDD, and WEL. The main control section makes up a negative-loop for stable automatic control. This section calculates GR(GL), SLC(GWD), SLC(MP), and SLC(WEL) for SL and CL control, and calculates crucible moving rate from GD(GL) and CI(MD), and determines SL and CL by using these parameters to control crystal-growing.
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