X-ray irradiation apparatus and x-ray exposure apparatus
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United States of America Patent
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Nov 27, 2001
Grant Date -
N/A
app pub date -
Aug 12, 1999
filing date -
Aug 13, 1998
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Abstract
An x-ray irradiation apparatus and x-ray exposure apparatus provide improved x-ray generation. The x-ray irradiation apparatus includes a target material feed-out device to provide a target material in a feed-out direction to a specified target position and a laser to provide laser light to the specified target position to cause the target material to emit x-rays. In some configurations, an x-ray generation position control device may be used to determine and control a position of x-ray generation, a rotary mechanism may be operatively connected to the target material feed-out device to axially rotate the target material feed-out device about the feed-out direction, and/or a target feed-out control device may be used to detect and control the position of the target material feed-out device.
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