Liquid dispensing systems and methods

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6322337
SERIAL NO

09360851

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides systems and methods of dispensing liquids. In one embodiment, the system includes a pump with a removable pump module with at least one displacement piston and at least one piston valve. A motor and base assembly provide the supporting components of the pump which can be used in environments where precise small volumes of ultra-pure liquids must be transferred from a reservoir to a point of use. The preferred embodiment of the system prevents contaminants and air bubbles from being introduced into the liquid to be dispensed by placing a filter across the discharge line downstream from the pump, and providing a separate drawback line for performing the drawback of the liquid in the dispensing nozzle.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VHOLLAND WEIDE EINDHOVEN VELDHOVEN NORTH BRABANT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Babikian, Dikran Millbrae, CA 52 442
Barney, John E Springfield, VT 3 128
Bensley, Douglas S Springfield, VT 9 264
Dimaggio, Frank Springfield, VT 3 14
Tanny, Mark Brownsville, VT 4 44

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