Solid state fluorine sensor system and method
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United States of America Patent
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Nov 27, 2001
Grant Date -
N/A
app pub date -
Oct 13, 2000
filing date -
Oct 15, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A gaseous fluorine detection system is provided which includes a generally enclosed sample cell containing a substrate comprising a material which interacts with fluorine gas to generate radiant energy. A gas sample of fluorine, the concentration levels of which are to be evaluated is flowed through the cell. A photomultiplier tube is positioned to receive the resulting radiant energy and generate an electrical output signal related to the level of said radiant energy. Means are provided for measuring the said photomultiplier output signal and relating same to the fluorine concentration of the gas sample provided to the cell.
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